Day 1:
Delhi Arrival, then 3 hour drive to Agra, and later local Agra city tour.
Night stay in Agra

Day 2:
Leave for Ayodhya, & reach by evening
Night stay in Ayodhya.

Day 3:
Local Ayodhya Sightseeing & night stay in Ayodhya.

Day 4:
Leave for Varanasi
Half day Varanasi tour
Night stay in Varanasi.

Day 5:
Full day Varanasi sightseeing
Night stay in Varanasi

Day 6:
Departure from Varanasi Railway Station or Airport Or By Car